Nitride microlens

Reference Number: K 02-24

Inventors: Jiang, Hongzing; Oder, Tom N.; Lin, Jingyu

Owner: Kansas State University Research Foundation

USPTO Link: 7193784

Invention Summary

This invention provides for the fabrication of nitride microlens arrays with sizes as small as 10 µm in diameter. The focal lengths of the microlenses vary from 7 to 30 µm. The surface profiles of the microlenses match very well with hemispherical fitting and surface roundness value of the 1 nm. However, the shape of the lens can be varied to include (but not be limited to) hemispherical and cylindrical shapes, with convex or concave curvatures.