Process for deposition of ultra-fine grained polycrystalline diamond films

Reference Number: N 03-03

Inventors: Tamor, Michael A.; Potter, Timothy J.; Wu, Ching-Hsong

Owner: NISTAC

USPTO Link: 5425965

Invention Summary

This invention is directed to a method for enhancing the diamond nucleation on a substrate prior to providing a diamond film thereon. More particularly, it is directed to a method which involved ultrasonic treatment of the substrate surface with a fluid consisting essentially of unsaturated oxygen-free hydrocarbons and diamond grit.