Fabrication of polycrystalline free-standing diamond films

Reference Number: N 03-03

Inventors: Potter, Timothy J.; Tamor, Michael A.; Wu, Ching-Hsong

Owner: NISTAC

USPTO Link: 5183529

Invention Summary

Method of fabricating free-standing diamond films by depositing and adhering polycrystalline diamond by hot filament chemical vapor deposition (1-100 Torr, filament temperature equal to or greater than 1900.degree. C., substrate temperature of 650.degree.-950.degree. C.) onto a substrate meltable at a temperature slightly in excess of the deposition temperature; and (b) prior to cooling said polycrystalline diamond particles, increasing (50.degree.-300.degree. C.) the substrate temperature to melt at least a portion thereof while permitting such melt to emigrate from the diamond films.